Thermal conductivity of DLC Films deposited from methane and acetylene by RF plasma enhanced CVD
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چکیده
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Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al2O3-films
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ژورنال
عنوان ژورنال: Netsu Bussei
سال: 2007
ISSN: 0913-946X,1881-414X
DOI: 10.2963/jjtp.21.131